Semiconductor and microprocessor producers need clean room or vacuum chambers to maintain purity and quality of their product. ASYS provides these advanced chambers, managed by robots that are calibrated with API trackers.
ASYS Automatic Systems GmbH & Co. KG in Schorndorf develops handling systems for the semiconductor industry and micro-structure technology. These robots, which are intended for vacuum and clean room applications, are designed and produced by ASYS, and are either offered as stand-alone or complete supply systems, including the necessary vacuum chambers. In addition to the quality of the vacuum and the purity, it’s above all the quality of the dynamic properties of the handling systems, such as repeatability and positioning accuracy, that are the major characteristics – which once again presents the metrology with very special challenges, as handling systems are constantly in motion during their work. As even the most advanced 3D-coordinate measurement machines cannot carry out dynamic measurements, laser trackers take over the calibration of the handling systems at ASYS.
The goal is to be able to deliver handling systems whose set-up time at the customer’s premises is limited to the pure installation, and does not require an on site teach-in at the customer’s premises. Against this background, ASYS decided to rely on the measurement capabilities of laser trackers, and to make use of the results of stationary and dynamic measurements made with them for operations in high vacuum and at specified purity. Two series of calculations are thereby required, one being a measurement series in the atmosphere (without vacuum); from this, the transformation equations could be determined that make it possible to calculate the measurement results in vacuum.
Laser trackers make use of their unique features here; the measurement of as many points as possible is desirable here for the precise determination of the trajectory of the robot. Laser trackers are therefore used in both stationary and mobile situations at ASYS; they are used for measuring long-term trials, and, at other locations, are also used in the stationary mode for production qualification and as assembly aids for the calibration of parts that are to be adjusted. The dynamic measurements at ASYS are carried out with 300 Hz and path speeds of up to 2m/s.